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Detailed Reference Information |
Paulus, M. and Martin, O.J.F. (2003). A Green's tensor approach to the modeling of nanostructure replication and characterization. Radio Science 38: doi: 10.1029/2001RS002563. issn: 0048-6604. |
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We use the Green's tensor technique to study the optical processes taking place in configurations typically used for the replication and characterization of nanostructures. For the replication process we investigate light-coupling masks for optical contact lithography and for the characterization process the mode scattered by a defect or a short grating in a planar waveguide. Both configurations consist of structures embedded in a stratified background composed of a stack of material layers with different permittivities. We perform calculations for two-dimensional and three-dimensional structures and compare their optical behavior. Our results show that the additional material interfaces in three-dimensional systems can lead to significantly different field distributions and must be taken into account for a complete understanding of the electromagnetic properties of the systems. |
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Abstract |
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Keywords
Electromagnetics, Wave propagation, Electromagnetics, Optics, Electromagnetics, Numerical methods, Electromagnetics, Scattering and diffraction, Electromagnetics, Guided waves |
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Publisher
American Geophysical Union 2000 Florida Avenue N.W. Washington, D.C. 20009-1277 USA 1-202-462-6900 1-202-328-0566 service@agu.org |
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