We report Yb isotopic data for the purpose of accurately correcting measurements of Lu and Lu/Hf ratios during Multicollector Inductively Coupled Plasma Mass Spectrometer (MC-ICPMS) analysis. The Yb isotopic ratios agree with recent results of Chu et al. <2002> and Amelin and Davis <2004>, when corrected for mass fractionation to the same reference values. Protocols for Lu measurement involving simultaneous subtraction of Yb interference and application of a fractionation correction based on Yb are described. It is shown that Lu concentrations and Lu/Hf ratios determined by MC-ICPMS using this methodology are more precise and potentially more accurate than results based on analysis of Lu by Thermal Ionization Mass Spectrometry (TIMS). A number of MC-ICPMS Lu-Hf isotopic analyses of standard rocks and other geological samples, previously analyzed by TIMS, are presented. These document reproducibility of Lu/Hf within 0.2%, where most discrepancies can be assigned to the unknown Lu mass fractionation during TIMS analysis.